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2016-07-19 [

Silvan Schmid

]

Pyrolytic carbon: A new exciting material for MEMS

Building MEMS directly from photoresist is a tempting idea, because it would allow for a cheap and fast microfabrication. SU-8 has been the first photoresist that has been successfully used as structural material in MEMS, because of its relatively high Young's modulus and chemical stability. In this paper we show that it is possible to fabricate micromechanical resonators made of pyrolytic carbon. These structures are created by directly pyrolising the photoresist (negative or positive), which again allows for a fast and cheap micro fabrication. But in contrast to SU-8, pyrolytic carbon has a better chemical and temperature stability, higher stiffness and it is biocompatible. Additionally, pyrolytic carbon is inherently conductive, which enables a direct integration in MEMS or electrochemical sensors. We show that it is possible to fabricate pyrolytic string resonators with quality factors of several thousand due to the stress-induced damping dilution.

M. Kurek, F. K. Larsen, P. E. Larsen, S. Schmid, A. Boisen, and S. S. Keller, “Nanomechanical Pyrolytic Carbon Resonators : Novel Fabrication Method and Characterization of Mechanical Properties,” Sensors, vol. 16, no. 1097, pp. 1–11, 2016.