ISAS AG MNS
> Zum Inhalt

Funding

Micro and Nanosensors Group

Welcome!

In the Micro and Nanosensors Group at the Institute of Sensor and Actuator Systems we study the fundamental physics of micro and nanomechanical systems in order to build advanced sensors for various physical and chemical quantities. For more information please check our research page and our latest publications.

Don't hesitate to contact us: Prof. Silvan Schmid.

To top

News

Monday, 2017-07-03

Fabrication and characterization of Au dimer antennas on glass pillars with enhanced plasmonic response

We report on the fabrication and dark-field spectroscopy characterization of Au dimer nanoantennas placed on top of SiO2 nanopillars. The reported process enables the fabrication of nanopillar dimers with gaps down to 15 nm and heights up to 1 μm. A...

More


Wednesday, 2017-06-14

Effect of oxygen plasma on nanomechanical silicon nitride resonators

Precise control of tensile stress and intrinsic damping is crucial for the optimal design of nanomechanical systems for sensor applications and quantum optomechanics in particular. In this work we study the influence of oxygen plasma on the tensile...

More


Monday, 2017-03-13

Nanomechanical vibrating filters for IR spectroscopy

Perforated silicon nitride membranes can be used as porous filters for sampling picograms of analyte simply nebulized from a dispersion. Measuring the resonance frequency of such structures irradiated with IR light allows obtaining IR spectra of a...

More


Friday, 2017-01-20

We would like to welcome our new Doctoral Student!

Zubair Buch joined our team. Welcome on board!

More


Monday, 2017-01-16

Position and Mode Dependent Optical Detection Back-Action in Cantilever Beam Resonators

Optical detection back-action in cantilever resonant or static detection presents a challenge when striving for state-of-the-art performance. The origin and possible routes for minimizing optical back-action have received little attention in...

More


Tuesday, 2016-12-06

We welcome our new group member!

Moostafa Moonir Shawrav our Post-doctoral Researcher. Welcome on board!

More


Tuesday, 2016-11-08

We welcome our new Postdoc!

Nicolas Cazier joined our team. Welcome on board!

More


Tuesday, 2016-11-08

We welcome our new Doctoral Students!

Miao-Hsuan Chien and Pedram Sadeghi

Welcome on board!

More


Friday, 2016-09-09

Silvan Schmid got awarded an ERC Starting Grant

We are excited to announce that Silvan Schmid received an ERC Starting Grant to work on Nanoplasmomechanical Systems. More information is given in the press release (German).

More


Tuesday, 2016-07-19

Pyrolytic carbon: A new exciting material for MEMS

Building MEMS directly from photoresist is a tempting idea, because it would allow for a cheap and fast microfabrication. SU-8 has been the first photoresist that has been successfully used as structural material in MEMS, because of its relatively...

More