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Micro and Nanosensors Group


In the Micro and Nanosensors Group at the Institute of Sensor and Actuator Systems we study the fundamental physics of micro and nanomechanical systems in order to build advanced sensors for various physical and chemical quantities. For more information please check our research page and our latest publications. 

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Wednesday, 2017-06-14

Effect of oxygen plasma on nanomechanical silicon nitride resonators

Precise control of tensile stress and intrinsic damping is crucial for the optimal design of nanomechanical systems for sensor applications and quantum optomechanics in particular. In this work we study the influence of oxygen plasma on the tensile...


Monday, 2017-03-13

Nanomechanical vibrating filters for IR spectroscopy

Perforated silicon nitride membranes can be used as porous filters for sampling picograms of analyte simply nebulized from a dispersion. Measuring the resonance frequency of such structures irradiated with IR light allows obtaining IR spectra of a...


Friday, 2017-01-20

We would like to welcome our new Doctoral Student!

Zubair Buch joined our team. Welcome on board!


Monday, 2017-01-16

Position and Mode Dependent Optical Detection Back-Action in Cantilever Beam Resonators

Optical detection back-action in cantilever resonant or static detection presents a challenge when striving for state-of-the-art performance. The origin and possible routes for minimizing optical back-action have received little attention in...


Tuesday, 2016-12-06

We welcome our new group member!

Moostafa Moonir Shawrav our Post-doctoral Researcher. Welcome on board!


Tuesday, 2016-11-08

We welcome our new Postdoc!

Nicolas Cazier joined our team. Welcome on board!


Tuesday, 2016-11-08

We welcome our new Doctoral Students!

Miao-Hsuan Chien and Pedram Sadeghi

Welcome on board!


Friday, 2016-09-09

Silvan Schmid got awarded an ERC Starting Grant

We are excited to announce that Silvan Schmid received an ERC Starting Grant to work on Nanoplasmomechanical Systems. More information is given in the press release (German).


Tuesday, 2016-07-19

Pyrolytic carbon: A new exciting material for MEMS

Building MEMS directly from photoresist is a tempting idea, because it would allow for a cheap and fast microfabrication. SU-8 has been the first photoresist that has been successfully used as structural material in MEMS, because of its relatively...


Thursday, 2016-06-23

Our book is available!

This authoritative book introduces and summarizes the latest models and skills required to design and fabricate nanomechanical resonators with a focus on nanomechanical sensing. It also establishes the theoretical foundation for courses on micro and...